Analytical Sciences

Computation Program System for Structural Analysis and Quantification of Organic Contaminants on Silicon Wafer Surfaces from Mass Spectra

Keiji SAITO,* Hiroshi SIMIZU,* and Toshio OGAWA**

*UBE Scientific Analysis Laboratory, Inc., Kogushi, Ube, Yamaguchi 755-8633, Japan
**Kanazawa Institute of Technology, Laboratory for Ecological Polymer and Organic Materials, Ohgigaoka, Nonoich, Ishikawa 921-8501, Japan

A computer program was developed for the identification and quantification of organic contaminants on silicon wafer surfaces and related materials based on GC/MS spectral data. Information, such as the retention time (RT), mass numberand peak intensity, was stored on 359 chemical compounds in the database. Some empirical equations were presented forcalculating the existence probabilities of certain organic compounds. This method was confirmed for the identificationand quantification of ultratrace organic contaminants on silicon wafer surfaces and related materials.

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